Diffusion furnaces

The Kanthal program includes diffusion cassettes for the manufacturing of crystalline silicon wafers used in solar and semiconductor applications.

Kanthal diffusion cassettes cover a wide range of processes, such as:

  • Fast-cooling applications such as polyimide cure
  • Atmospheric oxidation
  • LPCVD nitride

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Fibrothal® diffusion cassettes

Fibrothal® diffusion cassettes

In semiconductor manufacturing, uniform heating can make or break your process. Fibrothal® diffusion cassettes, available in light and heavy gauge variants, deliver tailored temperature control for reliable results. Whether you need fast response at lower temperatures or consistent performance under high heat, our cassettes support horizontal and vertical furnace setups, enabling greater flexibility and precision in diffusion processes.

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Fibrothal® heating modules
High temperature and resistance materials